Technology & Science

China Completes Secret EUV Lithography Prototype in Shenzhen

Beijing’s covert six-year project produced an operational extreme-ultraviolet lithography machine in early-2025—China’s first ability to generate EUV light without ASML hardware.

By Priya Castellano

Focusing Facts

  1. The prototype, built with ex-ASML engineers, went live inside a sealed Shenzhen lab in Q1 2025 after six years of development.
  2. Officials have set 2028 as the public target (insiders say 2030) for the machine to fabricate working <5 nm chips.
  3. Roughly 100 monitored graduates dismantle and rebuild salvaged ASML parts while Huawei coordinates a nationwide supply chain network.

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